Handbook of silicon based MEMS materials and technologies
(eBook)
Contributors
Published
Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Edition
1st ed.
Physical Desc
xxxii, 636 pages : ill.
Status
More Details
Format
eBook
Language
English
Notes
Bibliography
Includes bibliographical references and index.
Reproduction
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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Citations
APA Citation, 7th Edition (style guide)
Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies . William Andrew/Elsevier.
Chicago / Turabian - Author Date Citation, 17th Edition (style guide)Lindroos, Veikko. 2010. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew/Elsevier.
Chicago / Turabian - Humanities (Notes and Bibliography) Citation, 17th Edition (style guide)Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies William Andrew/Elsevier, 2010.
MLA Citation, 9th Edition (style guide)Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies William Andrew/Elsevier, 2010.
Note! Citations contain only title, author, edition, publisher, and year published. Citations should be used as a guideline and should be double checked for accuracy. Citation formats are based on standards as of August 2021.
Staff View
Grouped Work ID
dfec3219-3c6b-b637-fcfd-077c6965f506-eng
Grouping Information
Grouped Work ID | dfec3219-3c6b-b637-fcfd-077c6965f506-eng |
---|---|
Full title | handbook of silicon based mems materials and technologies |
Author | veikko lindroos |
Grouping Category | book |
Last Update | 2022-06-07 21:23:19PM |
Last Indexed | 2024-04-17 05:36:27AM |
Book Cover Information
Image Source | default |
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First Loaded | Apr 17, 2023 |
Last Used | Aug 4, 2023 |
Marc Record
First Detected | Aug 09, 2021 12:09:13 PM |
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Last File Modification Time | Nov 22, 2021 07:54:07 AM |
MARC Record
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490 | 1 | |a Micro & nano technologies | |
504 | |a Includes bibliographical references and index. | ||
533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
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650 | 0 | |a Microelectromechanical systems|x Materials. | |
650 | 0 | |a Silicon|x Electric properties. | |
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700 | 1 | |a Lindroos, Veikko. | |
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830 | 0 | |a Micro & nano technologies. | |
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