Handbook of silicon based MEMS materials and technologies
(eBook)
Contributors
Published
Amsterdam, [Netherlands] : William Andrew, 2015.
Edition
Second edition.
Physical Desc
1 online resource (827 pages) : illustrations (some color), photographs.
Status
More Details
Format
eBook
Language
English
ISBN
9780323312233 (e-book)
Notes
Bibliography
Includes bibliographical references at the end of each chapters and index.
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Citations
APA Citation, 7th Edition (style guide)
Tilli, M., & Aalto, T. (2015). Handbook of silicon based MEMS materials and technologies (Second edition.). William Andrew.
Chicago / Turabian - Author Date Citation, 17th Edition (style guide)Tilli, Markku and Timo, Aalto. 2015. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew.
Chicago / Turabian - Humanities (Notes and Bibliography) Citation, 17th Edition (style guide)Tilli, Markku and Timo, Aalto. Handbook of Silicon Based MEMS Materials and Technologies William Andrew, 2015.
MLA Citation, 9th Edition (style guide)Tilli, Markku,, and Timo Aalto. Handbook of Silicon Based MEMS Materials and Technologies Second edition., William Andrew, 2015.
Note! Citations contain only title, author, edition, publisher, and year published. Citations should be used as a guideline and should be double checked for accuracy. Citation formats are based on standards as of August 2021.
Staff View
Grouped Work ID
7a250de7-b952-455b-0626-13763871a6bd-eng
Grouping Information
| Grouped Work ID | 7a250de7-b952-455b-0626-13763871a6bd-eng |
|---|---|
| Full title | handbook of silicon based mems materials and technologies |
| Author | markku tilli and five others |
| Grouping Category | book |
| Last Update | 2022-06-07 21:23:19PM |
| Last Indexed | 2024-04-24 03:59:33AM |
Book Cover Information
| Image Source | syndetics |
|---|---|
| First Loaded | Feb 18, 2023 |
| Last Used | Oct 12, 2023 |
Marc Record
| First Detected | Aug 09, 2021 01:58:42 PM |
|---|---|
| Last File Modification Time | Nov 22, 2021 10:00:56 AM |
MARC Record
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| 020 | |a 9780323312233 (e-book) | ||
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| 245 | 0 | 0 | |a Handbook of silicon based MEMS materials and technologies|h [eBook] /|c edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others]. |
| 250 | |a Second edition. | ||
| 264 | 1 | |a Amsterdam, [Netherlands] :|b William Andrew,|c 2015. | |
| 264 | 4 | |c ©2015 | |
| 300 | |a 1 online resource (827 pages) :|b illustrations (some color), photographs. | ||
| 336 | |a text|2 rdacontent | ||
| 337 | |a computer|2 rdamedia | ||
| 338 | |a online resource|2 rdacarrier | ||
| 490 | 1 | |a Micro & Nano Technologies Series | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on print version record. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectromechanical systems|x Materials. | |
| 650 | 0 | |a Silicon|x Electric properties. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Tilli, Markku,|e editor. | |
| 700 | 1 | |a Aalto, Timo,|e contributor. | |
| 776 | 0 | 8 | |i Print version:|t Handbook of silicon based MEMS materials and technologies.|b Second edition.|d Amsterdam, [Netherlands] : William Andrew, c2015 |h xxxvii, 787 pages |k Micro & nano technologies.|z 9780323299657 |w 2015937707 |
| 797 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Micro & nano technologies. | |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/yavapai-ebooks/detail.action?docID=4003527|x Yavapai College|y Yavapai College users click here to access |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/prescottcollege-ebooks/detail.action?docID=4003527|x Prescott College|y Prescott College users click here to access |
| 856 | 4 | 0 | |u http://ebookcentral.proquest.com/lib/yln-ebooks/detail.action?docID=4003527|x Yavapai Library Network|y All other users click here to access |
| 945 | |a E-Book | ||
